POSAS GmbH

POSAS GmbH can offer all kind of Ozone Equipment like generators, analysers, calibrators, destruct units or complete Delivery Systems as well as sensor products to Enhance the Overall Equipment Efficiency (OEE) via Advanced Process Control (APC) like the Piezocon concentration sensor for precise precursor delivery, NDIR end-point-detectors for NF3, CO2… cleans, In-Situ Wafer Temperature Measurement.