CS Clean Solutions GmbH

As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environment and the climate. Exhaust gas treatment for e.g. ion implantation, plasma etching, chamber cleaning, photovoltaics, HDP-CVD, LPCVD, PECVD, MOCVD, ALD Safe, dry-chemical conversion of toxic gases into stable solids Solutions for research and production Global network for service and refill through local partners The new product line PCS PLASMA CONVERSION SYSTEMS now enhances the CLEANSORB® product portfolio.